Benzyl Methylacrylate

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New bottom antireflective coatings (BARCs) for 193 nm lithography have been
recently developed by Brewer Science Inc. Copolymers of benzyl methacrylate
(or benzyl acrylate) and hydroxypropyl methacrylate have been synthesized
and used ...
<http://159.226.140.39/search/detail.asp?id=14770&T_keyword=3333>

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